Patent Assignment
Reel/Frame 039292/0885
Assignment of Assignor's Interest
Recorded: 2016-07-29
Pages: 3
Assignor
INAGAKI, YUKIHIKO
Executed: 2016-05-19
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method