Patent Assignment
Reel/Frame 039317/0078
Assignment of Assignor's Interest
Recorded: 2016-08-02
Pages: 4
Assignors
SMILDE, HENDRIK JAN HIDDE
Executed: 2014-06-02
FAGGINGER AUER, BASTIAAN ONNE
Executed: 2014-06-02
HARUTYUNYAN, DAVIT
Executed: 2014-06-02
WARNAAR, PATRICK
Executed: 2014-06-16
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method