Patent Assignment
Reel/Frame 039347/0412
Assignment of Assignor's Interest
Recorded: 2016-08-04
Pages: 3
Assignors
CHEN, YIN-CHUAN
Executed: 2016-08-02
TSAI, CHI-MING
Executed: 2016-07-28
CHEN, SHIN-HUANG
Executed: 2016-07-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
System for and Method of Seeding an Optical Proximity Correction (Opc) Process