Patent Assignment
Reel/Frame 039393/0039
Assignment of Assignor's Interest
Recorded: 2016-08-10
Pages: 4
Assignors
SAITO, TAKEHISA
Executed: 2016-07-20
NEMOTO, TAKENAO
Executed: 2016-07-25
YAMAGISHI, KOJI
Executed: 2016-07-20
KANEKO, HIROSHI
Executed: 2016-07-29
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Film Formation Method