Patent Assignment
Reel/Frame 039397/0567
Assignment of Assignor's Interest
Recorded: 2016-08-10
Pages: 6
Assignors
CARCASI, MICHAEL
Executed: 2016-07-27
SOMERVELL, MARK
Executed: 2016-08-08
FONSECA, CARLOS
Executed: 2016-08-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Photo-sensitized Chemically Amplified Resist (PS-CAR) model calibration