Patent Assignment
Reel/Frame 039397/0943
Assignment of Assignor's Interest
Recorded: 2016-08-10
Pages: 7
Assignees
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
50,YONSEI-RO, SEODAEMUN-GU, SEOUL, KOREA, REPUBLIC OF
Covered Property
(1)
Tube-Type Lens, Optical Emission Spectroscopy (Oes) Apparatus Including the Tube-Type Lens, Plasma Monitoring System Including the Oes Apparatus, and Method of Manufacturing Semiconductor Device by Using the Plasma Monitoring System