Patent Assignment
Reel/Frame 039437/0680
Assignment of Assignor's Interest
Recorded: 2016-08-15
Pages: 9
Assignors
GOODWIN, TIMOTHY
Executed: 2015-04-17
NICOLAIDES, LENA
Executed: 2016-08-12
MAHADEVAN, MOHAN
Executed: 2015-04-16
HORN, PAUL
Executed: 2016-08-11
LI, SHIFANG
Executed: 2016-08-11
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Automated Inline Inspection of Wafer Edge Strain Profiles Using Rapid Photoreflectance Spectroscopy