Patent Assignment
Reel/Frame 039480/0629
Assignment of Assignor's Interest
Recorded: 2016-08-19
Pages: 9
Assignors
BIELING, STIG
Executed: 2016-08-10
HAUF, MARKUS
Executed: 2016-08-16
WISCHMEIER, LARS
Executed: 2016-08-10
HAACKER, FABIAN
Executed: 2016-08-16
ENDRES, MARTIN
Executed: 2016-08-12
EISENMENGER, JOHANNES
Executed: 2016-08-10
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Mirror Array