Patent Assignment
Reel/Frame 039495/0558
Assignment of Assignor's Interest
Recorded: 2016-08-22
Pages: 5
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Fabricating Metrology Targets Oriented with an Angle Rotated with Respect to Device Features