Patent Assignment
Reel/Frame 039498/0167
Assignment of Assignor's Interest
Recorded: 2016-08-22
Pages: 3
Assignors
SMILDE, HENDRIK JAN
Executed: 2013-12-05
ADAM, OMER ABUBAKER OMER
Executed: 2013-12-10
DEN BOEF, ARIE JEFFREY
Executed: 2013-12-05
JAK, MARTIN JACOBUS JOHAN
Executed: 2013-12-09
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method, Apparatus and Substrates for Lithographic Metrology