Patent Assignment
Reel/Frame 039511/0622
Assignment of Assignor's Interest
Recorded: 2016-08-23
Pages: 6
Assignors
TORIYA, DAISUKE
Executed: 2013-10-01
KOMORI, EIICHI
Executed: 2013-10-21
AMIKURA, MANABU
Executed: 2013-10-22
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Apparatus