Patent Assignment
Reel/Frame 039527/0738
Assignment of Assignor's Interest
Recorded: 2016-08-24
Pages: 4
Assignors
YANG, WENBING
Executed: 2016-08-22
TAN, SAMANTHA
Executed: 2016-08-18
KANARIK, KEREN JACOBS
Executed: 2016-08-18
MARKS, JEFFREY
Executed: 2016-08-18
KIM, TAESEUNG
Executed: 2016-08-18
SHEN, MEIHUA
Executed: 2016-08-24
LILL, THORSTEN
Executed: 2016-08-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etching of Tungsten and Other Metals