Patent Assignment
Reel/Frame 039541/0811
Assignment of Assignor's Interest
Recorded: 2016-08-25
Pages: 4
Assignors
KAL, SUBHADEEP
Executed: 2016-08-23
RALEY, ANGELIQUE D.
Executed: 2016-08-23
MOHANTY, NIHAR
Executed: 2016-08-23
MASDEN, AELAN
Executed: 2016-08-24
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and System for Selective Spacer Etch for Multi-Patterning Schemes