Patent Assignment
Reel/Frame 039544/0076
Assignment of Assignor's Interest
Recorded: 2016-08-25
Pages: 7
Assignors
KIM, KWANG SOO
Executed: 2016-05-27
PARK, SANGBONG
Executed: 2016-05-27
JEON, BYEONGHWAN
Executed: 2016-05-27
KIM, YOUNGDUK
Executed: 2016-05-27
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU,, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Inspection Apparatus, Semiconductor Device Manufacturing System Including the Same, and Method of Manufacturing a Semiconductor Device Using the Same