Patent Assignment
Reel/Frame 039600/0022
Assignment of Assignor's Interest
Recorded: 2016-08-31
Pages: 5
Assignors
MATHIJSSEN, SIMON GIJSBERT JOSEPHUS
Executed: 2013-11-18
VAN KRAAIJ, MARKUS GERARDUS MARTINUS MARIA
Executed: 2013-11-12
HUNSCHE, STEFAN
Executed: 2013-11-07
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Inspection Apparatus and Methods, Substrates Having Metrology Targets, Lithographic System and Device Manufacturing Method