Patent Assignment
Reel/Frame 039620/0992
Assignment of Assignor's Interest
Recorded: 2016-09-02
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus
Application:
15/255,352 →
Publication:
US 2017/0081764
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.