Patent Assignment
Reel/Frame 039623/0688
Assignment of Assignor's Interest
Recorded: 2016-09-02
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Charged Particle Beam Lithography Apparatus and Charged Particle Beam Lithography Method