Patent Assignment
Reel/Frame 039624/0017
Assignment of Assignor's Interest
Recorded: 2016-09-02
Pages: 6
Assignors
KATO, HITOSHI
Executed: 2016-08-03
OHIZUMI, YUKIO
Executed: 2016-08-03
HONMA, MANABU
Executed: 2016-08-03
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method