Patent Assignment
Reel/Frame 039625/0805
Assignment of Assignor's Interest
Recorded: 2016-09-02
Pages: 6
Assignors
RAINVILLE, MELIHA GOZDE
Executed: 2016-06-17
SHANKAR, NAGRAJ
Executed: 2016-06-17
DAMJANOVIC, DANIEL
Executed: 2016-06-24
REDDY, KAPU SIRISH
Executed: 2016-08-04
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(2)
Oxidizing Treatment of Aluminum Nitride Films in Semiconductor Device Manufacturing
Methods for Oxidizing Treatment of Aluminum Nitride Films in Semiconductor Device Manufacturing
Application:
62/327,742 →