Patent Assignment
Reel/Frame 039639/0230
Assignment of Assignor's Interest
Recorded: 2016-09-06
Pages: 5
Assignors
LU, CHI-MING
Executed: 2016-07-29
HUANG, CHIH-HUI
Executed: 2016-07-29
LI, SHENG-CHAN
Executed: 2016-07-29
TSAO, JUNG-CHIH
Executed: 2016-07-28
LIANG, YAO-HSIANG
Executed: 2016-07-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Semiconductor Device Having Stress-Neutralized Film Stack and Method of Fabricating Same