Patent Assignment
Reel/Frame 039663/0709
Assignment of Assignor's Interest
Recorded: 2016-09-07
Pages: 2
Assignors
KAPOOR, SUNIL
Executed: 2016-08-15
THOMAS, GEORGE
Executed: 2016-07-14
RANGINENI, YASWANTH
Executed: 2016-07-18
AUGUSTYNIAK, EDWARD
Executed: 2016-07-14
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Combiner and Distributor for Adjusting Impedances or Power Across Multiple Plasma Processing Stations