Patent Assignment
Reel/Frame 039692/0305
Assignment of Assignor's Interest
Recorded: 2016-09-09
Pages: 5
Assignors
FUNG, WAIKIT
Executed: 2016-09-07
MENG, LIANG
Executed: 2016-08-21
CHANDRASHEKAR, ANAND
Executed: 2016-08-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Pulsing Rf Power in Etch Process to Enhance Tungsten Gapfill Performance