Patent Assignment
Reel/Frame 039692/0680
Assignment of Assignor's Interest
Recorded: 2016-09-09
Pages: 2
Assignor
SWAMINATHAN, SHANKAR
Executed: 2016-09-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for UV-Based Suppression of Plasma Instability