Patent Assignment
Reel/Frame 039695/0230
Assignment of Assignor's Interest
Recorded: 2016-09-11
Pages: 7
Assignors
TAKEWAKI, MOTOYA
Executed: 2016-08-09
KOSUGI, TETSUYA
Executed: 2016-08-09
UENO, MASAAKI
Executed: 2016-08-09
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus Including Heating and Cooling Device, and Ceiling Part Included in the Same
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.