Patent Assignment
Reel/Frame 039697/0704
Assignment of Assignor's Interest
Recorded: 2016-09-12
Pages: 3
Assignor
NONAKA, JUN
Executed: 2016-08-08
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, 100-0005, JAPAN
Covered Property
(1)
Substrate Liquid Treatment Apparatus, Substrate Liquid Treatment Method and Storage Medium