Patent Assignment
Reel/Frame 039703/0145
Assignment of Assignor's Interest
Recorded: 2016-09-12
Pages: 4
Assignors
DUAN, ZIQING
Executed: 2016-08-01
LEE, KWANGDUK DOUGLAS
Executed: 2016-07-28
KHAJA, ABDUL AZIZ
Executed: 2016-07-26
BANSAL, AMIT KUMAR
Executed: 2016-07-29
KIM, BOK HOEN
Executed: 2016-08-02
KULSHRESHTHA, PRASHANT KUMAR
Executed: 2016-07-27
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods to Improve in-Film Particle Performance of Amorphous Boron-Carbon Hardmask Process in Pecvd System