Patent Assignment
Reel/Frame 039741/0264
Assignment of Assignor's Interest
Recorded: 2016-09-14
Pages: 5
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Methods and Apparatus for Measuring Height on a Semiconductor Wafer
Method and System of Height Sensor Using Differential Detection Technology for Semiconductor Inspection and Metrology
Application:
62/186,215 →