Patent Assignment
Reel/Frame 039803/0956
Assignment of Assignor's Interest
Recorded: 2016-09-20
Pages: 3
Assignor
DEVILLIERS, ANTON J.
Executed: 2016-09-12
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods of Forming Etch Masks for Sub-Resolution Substrate Patterning