Patent Assignment
Reel/Frame 039821/0366
Assignment of Assignor's Interest
Recorded: 2016-09-21
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Temporally Pulsed and Kinetically Modulated Cvd Dielectrics for Gapfill Applications