Patent Assignment
Reel/Frame 039834/0388
Assignment of Assignor's Interest
Recorded: 2016-09-22
Pages: 9
Assignors
NAKAMURA, YOSHINOBU
Executed: 2016-09-12
MINAMI, MASAYOSHI
Executed: 2016-09-12
ASAI, MASAYUKI
Executed: 2016-09-14
OKUDA, KAZUYUKI
Executed: 2016-09-14
URANO, YUJI
Executed: 2016-09-14
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Method of Cleaning Interior of Process Chamber, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.