Assignment of Assignor's Interest

Recorded: 2016-09-23 Pages: 8

Assignors

YOKAWA, TAKASHI

Executed: 2016-08-18

MIZUGUCHI, YASUHIRO

Executed: 2016-08-18

NOMURA, MAKOTO

Executed: 2016-08-18

SAITO, KAZUHITO

Executed: 2016-08-19

Assignee

HITACHI KOKUSAI ELECTRIC INC

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN

Covered Property (1)

Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, and Recording Medium

Application: 15/273,875 →

Publication: US 2017/0011974

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.