Patent Assignment
Reel/Frame 039845/0267
Assignment of Assignor's Interest
Recorded: 2016-09-23
Pages: 4
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Method for Detecting the Center of Substrate, Method for Transporting a Substrate, Transporting Unit and Apparatus for Treating a Substrate Including the Unit