Patent Assignment
Reel/Frame 039862/0356
Assignment of Assignor's Interest
Recorded: 2016-09-27
Pages: 2
Assignors
EHRMANN, ALBRECHT
Executed: 2016-04-04
GOEPPERT, MARKUS
Executed: 2016-06-15
HAIDNER, HELMUT
Executed: 2016-03-31
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Apparatus for Determining an Optical Property of an Optical Imaging System