Patent Assignment
Reel/Frame 039865/0173
Assignment of Assignor's Interest
Recorded: 2016-09-27
Pages: 10
Assignors
BECKER, JILL S
Executed: 2010-02-05
COUTU, ROGER R
Executed: 2010-02-03
MONSMA, DOUWE J
Executed: 2010-02-27
Assignee
CAMBRIDGE NANOTECH INC.
68 ROGERS STREET, CAMBRIDGE, MASSACHUSETTS, 02142
Covered Property
(1)
Plasma Atomic Layer Deposition System and Method
Application:
15/277,096 →
Publication:
US 2017/0016114
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 27, 2016
From: CAMBRIDGE NANOTECH INC.
To: SURTEK
Reel/Frame 039865/0275 →
Merger
Sep 27, 2016
From: SURTEK, INC
To: ULTRATECH, INC.
Reel/Frame 039865/0330 →
Assignment of Assignor's Interest
Dec 30, 2019
From: ULTRATECH, INC.
To: VEECO INSTRUMENTS INC.
Reel/Frame 051446/0476 →