Patent Assignment
Reel/Frame 039893/0947
Assignment of Assignor's Interest
Recorded: 2016-09-29
Pages: 3
Assignor
KITAGAWA, DAI
Executed: 2016-09-26
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Power Feeding Mechanism and Method for Controlling Temperature of a Stage