Patent Assignment
Reel/Frame 039901/0752
Assignment of Assignor's Interest
Recorded: 2016-09-30
Pages: 3
Assignor
TSUJIKAWA, TAKURO
Executed: 2016-06-09
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Detection Apparatus, Lithography Apparatus, Method of Manufacturing Article, and Detection Method