Patent Assignment
Reel/Frame 039931/0164
Assignment of Assignor's Interest
Recorded: 2016-10-04
Pages: 3
Assignee
RENESAS ELECTRONICS CORPORATION
2-24, TOYOSU 3-CHOME, KOUTOU-KU, TOKYO, 135-0061, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Device and Semiconductor Manufacturing Apparatus Using a Conveying Robot Conveying a Semiconductor Substrate