Patent Assignment
Reel/Frame 039933/0865
Assignment of Assignor's Interest
Recorded: 2016-10-04
Pages: 6
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Integration Scheme for Microelectromechanical Systems (Mems) Devices and Complementary Metal-Oxide-Semiconductor (Cmos) Devices