Patent Assignment
Reel/Frame 039946/0262
Assignment of Assignor's Interest
Recorded: 2016-10-05
Pages: 7
Assignors
SHIN, JAECHUL
Executed: 2016-08-26
LEE, JONGCHEOL
Executed: 2016-08-26
CHOI, GEUNKYU
Executed: 2016-09-19
JUNG, MINHWA
Executed: 2016-08-26
CHUNG, SUKJIN
Executed: 2016-08-26
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Semiconductor Device Manufacturing Apparatus Having Plurality of Gas Exhausting Pipes and Gas Sensors