Patent Assignment
Reel/Frame 039995/0502
Assignment of Assignor's Interest
Recorded: 2016-10-12
Pages: 3
Assignors
HSU, DUAN-FU STEPHEN
Executed: 2014-03-31
JIA, JIANJUN
Executed: 2014-03-21
LIU, XIAOFENG
Executed: 2014-03-21
ZHANG, CUIPING
Executed: 2014-03-21
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Pattern Placement Error Aware Optimization