Patent Assignment
Reel/Frame 040009/0217
Assignment of Assignor's Interest
Recorded: 2016-10-13
Pages: 6
Assignors
NAKATA, AKIHIKO
Executed: 2016-09-26
MORIOKA, AKIHITO
Executed: 2016-09-26
SUGAWARA, TSUKASA
Executed: 2016-09-26
Assignee
TOKYO OHKA KOGYO CO., LTD.
150, NAKAMARUKO, NAKAHARA-KU, KANAGAWA-KEN, KAWASAKI-SHI, 211-0012, JAPAN
Covered Property
(1)
Filtration Filter, Filtration Method, Production Method of Purified Liquid Chemical Product for Lithography, and Method of Forming Resist Pattern