Patent Assignment
Reel/Frame 040091/0861
Assignment of Assignor's Interest
Recorded: 2016-10-21
Pages: 6
Assignors
HATAKEYAMA, JUN
Executed: 2016-09-12
SASAMI, TAKESHI
Executed: 2016-09-12
OHASHI, MASAKI
Executed: 2016-09-12
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition, Patterning Process, and Barium, Cesium and Cerium Salts