Patent Assignment
Reel/Frame 040098/0483
Assignment of Assignor's Interest
Recorded: 2016-10-24
Pages: 5
Assignors
VANOPPEN, PETER CLEMENT PAUL
Executed: 2013-01-08
ENGELEN, ADRIANUS FRANCISCUS PETRUS
Executed: 2013-01-29
HINNEN, PAUL CHRISTIAAN
Executed: 2013-01-08
DEN BESTEN, JAN HENDRIK
Executed: 2013-01-08
CRAMER, HUGO AUGUSTINUS JOSEPH
Executed: 2013-01-08
BROUWER, ERIC JOS ANTON
Executed: 2013-01-08
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method of Determining Dose and Focus, Inspection Apparatus, Patterning Device, Substrate and Device Manufacturing Method