Patent Assignment
Reel/Frame 040107/0786
Assignment of Assignor's Interest
Recorded: 2016-10-25
Pages: 7
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2014-02-27
DEN BOEF, ARIE JEFFREY
Executed: 2014-03-03
ADAM, OMER ABUBAKER OMER
Executed: 2014-02-27
HUANG, TE-CHIH
Executed: 2014-03-12
ZHANG, YOUPING
Executed: 2014-03-07
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Measuring a Process Parameter for a Manufacturing Process Involving Lithography