Patent Assignment
Reel/Frame 040152/0813
Assignment of Assignor's Interest
Recorded: 2016-10-27
Pages: 3
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Method and Apparatus, Computer Program and Lithographic System