Patent Assignment
Reel/Frame 040225/0096
Assignment of Assignor's Interest
Recorded: 2016-11-04
Pages: 3
Assignor
SATO, TAKAYUKI
Executed: 2016-08-18
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA, 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.