Patent Assignment
Reel/Frame 040258/0118
Assignment of Assignor's Interest
Recorded: 2016-11-08
Pages: 5
Assignors
KOBATA, ITSUKI
Executed: 2016-07-22
YAGI, KEITA
Executed: 2016-07-22
WATANABE, KATSUHIDE
Executed: 2016-07-22
SHIOKAWA, YOICHI
Executed: 2016-07-22
MARUYAMA, TORU
Executed: 2016-07-22
TAKAHASHI, NOBUYUKI
Executed: 2016-07-22
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing System. and Substrate Processing Method