Patent Assignment
Reel/Frame 040267/0548
Assignment of Assignor's Interest
Recorded: 2016-11-09
Pages: 3
Assignor
WADA, TOSHIHARU
Executed: 2016-11-07
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Plasma Etching