Patent Assignment
Reel/Frame 040278/0360
Assignment of Assignor's Interest
Recorded: 2016-11-10
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Processing Apparatus