Patent Assignment
Reel/Frame 040279/0535
Assignment of Assignor's Interest
Recorded: 2016-11-10
Pages: 3
Assignor
PATRA, MICHAEL
Executed: 2016-11-09
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Euv Light Source for a Lighting Device of a Microlithographic Projection Exposure Apparatus